Vacuum Pumps
MR Series
Oil-free, multi-stage Roots vacuum pumps across six displacement sizes, sized to match your process flow.
015-year service interval (air / N₂ duty)
02No seals to replace — no wear debris, no performance drift
03Dry, oil-free design keeps the vacuum chamber contamination-free
04Built-in frequency converter — same output at 50 Hz or 60 Hz
05Handles light water vapor and solvent vapor loads with the gas ballast open
06Air-cooled — no cooling water supply required
How a multi-stage Roots pump works
In each stage, a pair of rotors turns in opposite directions without touching, moving gas on toward the outlet. The gas passes through several stages in turn, with no oil in the gas path.
01 · INTAKEGas is drawn in from your vacuum chamber at the inlet.
02 · STAGE TO STAGEEach rotor pair passes the gas through an orifice in the stator disk to the next stage, and the pressure rises along the way.
03 · OUTLETThe gas leaves the last stage and is discharged to the exhaust.
Schematic illustration, simplified and not to scale. Stage count and rotor proportions are illustrative.
MR7
Pumping speed7 m³/h
Ultimate pressure5 Pa
MR15
Pumping speed15 m³/h
Ultimate pressure1 Pa
MR30
Pumping speed30 m³/h
Ultimate pressure1 Pa
MR36
Pumping speed36 m³/h
Ultimate pressure1 Pa
MR60
Pumping speed60 m³/h
Ultimate pressure2 Pa
MR100
Pumping speed100 m³/h
Ultimate pressure2 Pa
Comparing models? Full specifications for all six sizes, side by side:
| Model | MR7 | MR15 | MR30 | MR36 | MR60 | MR100 |
|---|---|---|---|---|---|---|
| Pumping speed — m³/h (L/s) | 7 (2) | 15 (4) | 30 (8) | 36 (10) | 60 (16) | 100 (28) |
| Ultimate pressure — Pa (gas ballast closed) | 5 | 1 | 1 | 1 | 2 | 2 |
| Max. motor power | 0.29 kW | 0.34 kW | 0.35 kW | 0.61 kW | 0.94 kW | 0.60 kW |
| Max. water vapor capacity — g/h (gas ballast open) | 120 | 250 | 250 | 350 | 600 | 600 |
| Noise level | ≤56 dB(A) | ≤56 dB(A) | ≤56 dB(A) | ≤58 dB(A) | ≤60 dB(A) | ≤55 dB(A) |
| Weight | 19 kg | 23 kg | 25 kg | 54 kg | 56 kg | 90 kg |
| Inlet port | NW25 | NW25 | NW40 | NW40 | NW40 | NW40 |
| Outlet port | NW25 | NW25 | NW25 | NW25 | NW25 | NW25 |
| Dimensions — L×W×H (mm) | 360×196×219 | 385×210×255 | 410×210×255 | 475×298×275 | 530×315×275 | 576×320×365 |
S-P
Measured pumping speed (L/min) across inlet pressure (Torr) for all six MR models.
Compatible accessories: HW-series inlet filters (HW25 / HW40) and HXW-series exhaust silencers (HXW25 / HXW40) are available for all MR models — ask your account engineer for the fitment guide.